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Bombardment and gas rarefaction effects on the properties of sputtered Ti thin films

✍ Scribed by W. Tsai; M.J. Brett; S.K. Dew; D. Liu; T. Smy; R.N. Tait


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
417 KB
Volume
253
Category
Article
ISSN
0040-6090

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