Microstructure and Properties of Solution Deposited, Nb-Doped PZT Thin Films
โ Scribed by M. Es-Souni; A. Piorra; C.-H. Solterbeck; S. Iakovlev; M. Abed
- Book ID
- 110425486
- Publisher
- Springer US
- Year
- 2002
- Tongue
- English
- Weight
- 895 KB
- Volume
- 9
- Category
- Article
- ISSN
- 1385-3449
No coin nor oath required. For personal study only.
๐ SIMILAR VOLUMES
Research into chemical solution deposition (CSD) methods for ferroelectric thin films is oriented towards higher reliability and lower processing temperatures. In this paper several aspects of CSD PZT thin films related to processing are discussed. The reliability of PZT thin films is related to the
Pb(Zr, Ti)O 3 (PZT) thin films with Zr/Ti ratio of 92/8 and doped with up to 4 at.% Nb were deposited by sol-gel on Pt coated Si substrates. The scope was to investigate the influence of Nb additive on the structural, optical and electrical properties of Zr-rich PZT phase. It was found that a residu