Electrical, structural, photoluminescenc
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J. Ni; X. Zhao; X. Zheng; J. Zhao; B. Liu
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Article
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2009
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Elsevier Science
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English
โ 683 KB
P-type transparent conducting antimony-doped tin oxide (ATO) films were successfully fabricated on quartz glass substrates by radiofrequency magnetron sputtering using a 20 mol.% Sb-doped SnO 2 ceramic target. The deposited films were annealed at different temperatures for different durations. Hall