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Study on the transition temperature and phase formation sequence in TiZr silicides on Si(100)

✍ Scribed by Cha, Taeho; Yoon, Sanghyun; Lee, Dongkun; Ryu, Hyun; Lee, Hwackjoo; Kim, Changsoo; Jeon, Hyeongtag

Book ID: 126141248
Publisher: AVS (American Vacuum Society)
Year: 1999
Tongue: English
Weight: 623 KB
Volume: 17
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.581592

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