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Comparative AES and RHEED study of the formation of Pd silicide on clean and oxide covered Si(100) and (111) surfaces

✍ Scribed by R. Anton; U. Neukirch

Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 793 KB
Volume: 29
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(87)90034-1

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