In situ X-ray diffraction study of the formation of TiSi2-C49 phase from Ti-Si multilayers on Si(100)

✍ Scribed by J. Sariel; Haydn Chen; J.F. Jongste; S. Radelaar

• Book ID: 113300339
• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 554 KB
• Volume: 40
• Category: Article
• ISSN: 0254-0584
• DOI: 10.1016/0254-0584(94)01457-r