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The effect of temperature on the epitaxial quality of bilayers of iridium silicide and SiGe deposited on Si(100) in ultrahigh vacuum

✍ Scribed by C.K. Chung; J. Hwang; Y.H. Chang; W.J. Chen; L.P. Wang


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
699 KB
Volume
126
Category
Article
ISSN
0022-0248

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