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On the formation of molybdenum silicides in MoSi multilayers: the effect of Mo thickness and annealing temperature

✍ Scribed by Y. Ijdiyaou; M. Azizan; E.L. Ameziane; M. Brunel; T.A. Nguyen Tan


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
318 KB
Volume
55
Category
Article
ISSN
0169-4332

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