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EXAFS measurements on the structure of Mo/Si multilayers produced using ion bombardment and increased deposition temperature

✍ Scribed by H.-J. Voorma; G.E. van Dorssen; E. Louis; N.B. Koster; A.D. Smith; M.D. Roper; F. Bijkerk


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
937 KB
Volume
93
Category
Article
ISSN
0169-4332

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