✦ LIBER ✦
Zr-silicide formation during the epitaxial growth of Y-stabilized zirconia films on Si(100) and its avoidance by ion beam assisted deposition at a reduced temperature
✍ Scribed by T. Koch; P. Ziemann
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 672 KB
- Volume
- 99
- Category
- Article
- ISSN
- 0169-4332
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