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Study on the anti-reflection and structure evolution of hydrogenated amorphous carbon grown by plasma chemical vapor deposition

✍ Scribed by Shi, Jing; Geng, Zhongrong; Zhang, Junyan; Wang, Chengbing

Book ID: 125510638
Publisher: John Wiley and Sons
Year: 2014
Tongue: English
Weight: 793 KB
Volume: 46
Category: Article
ISSN: 0142-2421
DOI: 10.1002/sia.5553

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