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Influence of deposition pressure on hydrogenated amorphous carbon films prepared by d.c.-pulse plasma chemical vapor deposition

✍ Scribed by Chengbing Wang; Jing Shi; Rongbin Xia; Zhongrong Geng


Book ID
115562063
Publisher
John Wiley and Sons
Year
2012
Tongue
English
Weight
594 KB
Volume
45
Category
Article
ISSN
0142-2421

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