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Influence of krypton atoms on the structure of hydrogenated amorphous carbon deposited by plasma enhanced chemical vapor deposition

✍ Scribed by Oliveira, M. H.; Viana, G. A.; de Lima, M. M.; Cros, A.; Cantarero, A.; Marques, F. C.


Book ID
121252826
Publisher
American Institute of Physics
Year
2010
Tongue
English
Weight
978 KB
Volume
108
Category
Article
ISSN
0021-8979

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