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Study on ta diffusion barrier in Al/Si system

✍ Scribed by Jaehwa Kim; Dong-Soo Yoon; Joon Seop Kwak; Hong Koo Baik; Sung-Man Lee


Book ID
107457991
Publisher
Springer US
Year
1999
Tongue
English
Weight
698 KB
Volume
28
Category
Article
ISSN
0361-5235

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