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Schottky device behavior of n-Si/Pd2Si/Al and n-Si/CoSi2/Al contacts with and without a Ta2N diffusion barrier

✍ Scribed by Mukta S. Farooq; Shyam P. Murarka


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
496 KB
Volume
19
Category
Article
ISSN
0921-5107

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