✦ LIBER ✦
Evaluation of HfN thin films considered as diffusion barriers in the Al/HfN/Si system
✍ Scribed by R. Nowak; C.L. Li
- Book ID
- 108389147
- Publisher
- Elsevier Science
- Year
- 1997
- Tongue
- English
- Weight
- 720 KB
- Volume
- 305
- Category
- Article
- ISSN
- 0040-6090
No coin nor oath required. For personal study only.