✦ LIBER ✦

Study of tantalum-based diffusion barriers between Al and Si

✍ Scribed by Wen-Chun Wang; Tzong-Sheng Chang; Fon-Shan Huang

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Diffusion barrier effects of Al3Zr/Zr bi

✍ Hideto Yanagisawa; Atsushi Noya; Katsutaka Sasaki; Yoshio Abe 📂 Article 📅 1996 🏛 John Wiley and Sons 🌐 English ⚖ 565 KB

Diffusion barrier property of TaN betwee

✍ Takeo Oku; Eiji Kawakami; Masaki Uekubo; Katsumi Takahiro; Sadae Yamaguchi; Masa 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 665 KB

Performance of W100−xNx diffusion barrie

✍ P.J. Pokela; C.-K. Kwok; E. Kolawa; S. Raud; M.-A. Nicolet 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 740 KB

Sputtering of tantalum-based diffusion b

✍ M. Stavrev; C. Wenzel; A. Möller; K. Drescher 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 662 KB

Correlation between series resistance an

✍ M Siad; A Keffous; S Mamma; Y Belkacem; H Menari 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 217 KB

Marker barrier effect in diffusion speci

✍ S.Q. Wang; J.W. Mayer 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 796 KB