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Diffusion barrier effects of Al3Zr/Zr bilayered films interposed between Al and Si

✍ Scribed by Hideto Yanagisawa; Atsushi Noya; Katsutaka Sasaki; Yoshio Abe


Publisher
John Wiley and Sons
Year
1996
Tongue
English
Weight
565 KB
Volume
79
Category
Article
ISSN
8756-663X

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