✦ LIBER ✦
Sputtering of tantalum-based diffusion barriers in SiCu metallization: effects of gas pressure and composition
✍ Scribed by M. Stavrev; C. Wenzel; A. Möller; K. Drescher
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 662 KB
- Volume
- 91
- Category
- Article
- ISSN
- 0169-4332
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