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Study of the aluminum doping of zinc oxide films prepared by atomic layer deposition at low temperature

✍ Scribed by Genevée, Pascal; Donsanti, Frederique; Renou, Gilles; Lincot, Daniel

Book ID
119192673
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
764 KB
Volume
264
Category
Article
ISSN
0169-4332

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The uniformity of Al distribution in aluminum-doped zinc oxide films grown by atomic layer deposition
✍ G. Luka; L. Wachnicki; B.S. Witkowski; T.A. Krajewski; R. Jakiela; E. Guziewicz; 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 929 KB

We investigated the aluminum distribution in aluminum-doped zinc oxide films grown by atomic layer deposition. Surface morphology, structure, composition and electrical properties of obtained films were studied. For the aluminum content less than 2 at.%, a periodicity of Al distribution along the la