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The kinetics of low-temperature spatial atomic layer deposition of aluminum oxide

✍ Scribed by Poodt, P.; Illiberi, A.; Roozeboom, F.

Book ID: 118070228
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 446 KB
Volume: 532
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2012.10.109

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