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Growth characteristics and film properties of gallium doped zinc oxide prepared by atomic layer deposition

✍ Scribed by Maeng, W. J.; Park, Jin-Seong

Book ID
121599102
Publisher
Springer US
Year
2013
Tongue
English
Weight
566 KB
Volume
31
Category
Article
ISSN
1385-3449

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We investigated the aluminum distribution in aluminum-doped zinc oxide films grown by atomic layer deposition. Surface morphology, structure, composition and electrical properties of obtained films were studied. For the aluminum content less than 2 at.%, a periodicity of Al distribution along the la