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Growth characteristics and properties of Ga-doped ZnO (GZO) thin films grown by thermal and plasma-enhanced atomic layer deposition

โœ Scribed by Nam, Taewook; Lee, Chang Wan; Kim, Hyun Jae; Kim, Hyungjun


Book ID
121468878
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
734 KB
Volume
295
Category
Article
ISSN
0169-4332

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