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Study of near-surface layers modified by ion implantation in Si wafers by grazing incidence X-ray reflectometry

✍ Scribed by J.B Pełka; J Auleytner; J Domagała; Z Werner; M Janik-Czachor


Book ID
117625279
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
203 KB
Volume
286
Category
Article
ISSN
0925-8388

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