Grazing-incidence X-ray scattering and diffraction study of the nitrogen ion implantation layer produced by plasma-based ion implantation

✍ Scribed by W.L Li; W.D Fei; Y Sun

• Book ID: 108422976
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 160 KB
• Volume: 150
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/s0257-8972(01)01510-9