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X-ray-emission study of the structure of Si:H layers formed by low-energy hydrogen-ion implantation

✍ Scribed by V. R. Galakhov; I. V. Antonova; S. N. Shamin; V. I. Aksenova; V. I. Obodnikov; A. K. Gutakovskii; V. P. Popov


Book ID
110131250
Publisher
Springer
Year
2002
Tongue
English
Weight
136 KB
Volume
36
Category
Article
ISSN
1063-7826

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