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An X-ray photoelectron spectroscopy study of carbon nitride films grown by low energy ion implantation

✍ Scribed by L. Galán; I. Montero; F. Rueda

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 740 KB
Volume: 83
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(95)02824-2

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