✦ LIBER ✦
Evolution of end-of-range defects in Si after Xe implantation studied by grazing incidence diffuse X-ray scattering
✍ Scribed by L. Capello; T.H. Metzger
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 305 KB
- Volume
- 114-115
- Category
- Article
- ISSN
- 0921-5107
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