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Studies of mist deposited high-k dielectrics for MOS gates

✍ Scribed by D.-O Lee; P Roman; C.-T Wu; W Mahoney; M Horn; P Mumbauer; M Brubaker; R Grant; J Ruzyllo

Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 358 KB
Volume: 59
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(01)00676-1

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