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A study of mixtures of HfO2 and TiO2 as high-k gate dielectrics

โœ Scribed by F. Chen; X. Bin; C. Hella; X. Shi; W.L. Gladfelter; S.A. Campbell


Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
189 KB
Volume
72
Category
Article
ISSN
0167-9317

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