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Nanoscale electrical characterization of ultrathin high-k dielectric MOS stacks: A conducting AFM study

✍ Scribed by H.J. Uppal; S. Bernardini; E. Efthymiou; S.N. Volkos; A. Dimoulas; V. Markevich; B. Hamilton; A.R. Peaker


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
645 KB
Volume
11
Category
Article
ISSN
1369-8001

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