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Studies about wafer bow of freestanding GaN substrates grown by hydride vapor phase epitaxy

✍ Scribed by F. Lipski; M. Klein; X. Yao; F. Scholz

Book ID: 116630068
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 374 KB
Volume: 352
Category: Article
ISSN: 0022-0248
DOI: 10.1016/j.jcrysgro.2011.10.021

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