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Structures prepared by implantation of silicon with nitrogen and annealing under high hydrostatic pressure

✍ Scribed by W. Rzodkiewicz; A. Kudla; A. Misiuk; B. Surma; J. Bak-Misiuk; J. Härtwig; J. Ratajczak

Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 259 KB
Volume: 7
Category: Article
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2004.09.003

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