✦ LIBER ✦
Features of buried dielectric layers: ion beam synthesis in silicon by a high temperature sequential oxygen and nitrogen implantation with substoichiometric doses
✍ Scribed by L.A. Charni; A.B. Danilin; K.A. Drakin; A.A. Malinin; Yu.N. Parkhomenko; A.F. Petrov; O.I. Vyletalina
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 484 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0921-5107
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