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Structure evolution of magnetron sputtered TiO[sub 2] thin films

✍ Scribed by MraÌz, Stanislav; Schneider, Jochen M.

Book ID: 120014172
Publisher: American Institute of Physics
Year: 2011
Tongue: English
Weight: 603 KB
Volume: 109
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.3536635

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