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Structural evolution and optical properties of TiO[sub 2] thin films prepared by thermal oxidation of sputtered Ti films

✍ Scribed by Ting, Chu-Chi; Chen, San-Yuan; Liu, Dean-Mo

Book ID
120813518
Publisher
American Institute of Physics
Year
2000
Tongue
English
Weight
492 KB
Volume
88
Category
Article
ISSN
0021-8979

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The structural and electrical properties
The structural and electrical properties of TiO2 thin films prepared by thermal oxidation
✍ P. Chowdhury; Harish C. Barshilia; N. Selvakumar; B. Deepthi; K.S. Rajam; Ayan R πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 515 KB

Thin films of TiO 2 were grown on n-type Si substrate by thermal oxidation of Ti films deposited by dc sputtering. The phase purity of TiO 2 was confirmed by Raman spectroscopy, and secondary ion mass spectroscopy was used to analyze the interfacial and chemical composition of the TiO 2 thin films.