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Structure and Composition of TiVN Thin Films Deposited by Reactive DC Magnetron Co-sputtering

✍ Scribed by T. Deeleard; A. Buranawong; A. Choeysuppaket; N. Witit-anun; S. Chaiyakun; P. Limsuwan

Book ID
119357506
Publisher
Elsevier
Year
2012
Tongue
English
Weight
446 KB
Volume
32
Category
Article
ISSN
1877-7058

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