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Structural characterization of high-dose C++N+ ion-implanted (1 1 1) Si

✍ Scribed by L. Barbadillo; M.J. Hernández; M. Cervera; P. Rodrı́guez; J. Piqueras; S.I. Molina; F.M. Morales; D. Araújo

Book ID: 114165072
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 646 KB
Volume: 184
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(01)00783-2

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Structural characterization of high-dose C++N+ ion-implanted (1&#xa0;1&#xa0;1) Si

Structural characterization of high-dose C++N+ ion-implanted (1 1 1) Si