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High efficiency gettering of Au in Si(1 1 1) by MeV C implantation

✍ Scribed by S. Mohapatra; B. Joseph; D.P. Mahapatra; P. Chakraborty

No coin nor oath required. For personal study only.

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High efficiency gettering of Au in Si(1&#xa0;1&#xa0;1) by MeV C implantation