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Patterned microstructures formed with MeV Au implantation in Si(1 0 0)

✍ Scribed by Bibhudutta Rout; Richard R. Greco; Daniel P. Zachry; Alexander D. Dymnikov; Gary A. Glass

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
400 KB
Volume
250
Category
Article
ISSN
0168-583X

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