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Oxidation study of Sb+ implanted Si(1 0 0) and Si(1 1 1) targets. Use of high-resolution RBS technique

✍ Scribed by R Labbani; R Halimi

Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
214 KB
Volume
521
Category
Article
ISSN
0168-9002

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