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Fabrication of nanostructures on Si(1 0 0) and GaAs(1 0 0) by local anodic oxidation

✍ Scribed by Jiří Červenka; Radek Kalousek; Miroslav Bartošík; David Škoda; Ondřej Tomanec; Tomáš Šikola

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 647 KB
Volume: 253
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2006.03.095

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