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Observation of Si emission during thermal oxidation of Si(0 0 1) with high-resolution RBS

✍ Scribed by S. Hosoi; K. Nakajima; M. Suzuki; K. Kimura; Y. Shimizu; S. Fukatsu; K.M. Itoh; M. Uematsu; H. Kageshima; K. Shiraishi

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 197 KB
Volume: 249
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2006.04.036

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