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Atomic simulation of energetic fluorine interacting with Si(0 0 1)

✍ Scribed by F. Gou; X. Lu; Qiu Qian; J.Y. Tang

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 512 KB
Volume: 265
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2007.08.099

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Atomic simulation of energetic fluorine interacting with Si(0&#xa0;0&#xa0;1)

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