We report on the formation of different arrays of pyramid-like Si nanostructures at the onset of silicon homoepitaxial growth. Such nano-objects are observed to reproducibly develop in Si films grown by molecular beam epitaxy on HF-treated Si(0 0 1) substrates, for a narrow set of growth conditions.
β¦ LIBER β¦
Shape transition of nanostructures created on Si(1 0 0) surfaces after MeV implantation
β Scribed by D. Paramanik; S. Dey; V. Ganesan; S. Varma
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 197 KB
- Volume
- 244
- Category
- Article
- ISSN
- 0168-583X
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