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Structural change of TiN/Ti/SiO2 multilayers by N2 annealing

✍ Scribed by Hirotaka Hamamura; Hitoshi Itoh; Yukihiro Shimogaki; Junichi Aoyama; Takeo Yoshimi; Jun Ueda; Hiroshi Komiyama

No coin nor oath required. For personal study only.

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