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Structural and mechanical investigations of magnetron sputtering TiO2/Ti/TiN multilayer films on Si(100) substrate

✍ Scribed by Adele Carradò; Guy Schmerber; Hervè Pelletier


Book ID
107562332
Publisher
Springer US
Year
2010
Tongue
English
Weight
1019 KB
Volume
7
Category
Article
ISSN
1935-3804

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