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Substrate bias effects on mechanical and tribological properties of substitutional solid solution (Ti, Al)N films prepared by reactive magnetron sputtering

✍ Scribed by K. Chu; P.W. Shum; Y.G. Shen

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
915 KB
Volume
131
Category
Article
ISSN
0921-5107

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Mo-Al-Si-N films were deposited by reactive magnetron sputtering on substrates of Si wafer, alumina, and stainless steel from composite targets consisting of Mo, Al and Si. To investigate the effect of Al content on the properties of the Mo-Al-Si-N films at a constant Si content of 9 at.%, the chemi