𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Study on the mechanical and chemical properties of (Ti,Al)N films prepared by DC magnetron sputtering

✍ Scribed by Shengrui Jiang; Dongliang Peng; Xueying Zhao; Liang Xie; Qiang Li

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
385 KB
Volume
84
Category
Article
ISSN
0169-4332

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Relationship between Condition of Deposi
Relationship between Condition of Deposition and Properties of W-Ti-N Thin Films Prepared by Reactive Magnetron Sputtering
✍ A. V. Kuchuk; V. P. Kladko; O. S. Lytvyn; A. Piotrowska; R. A. Minikayev; R. Rat πŸ“‚ Article πŸ“… 2006 πŸ› John Wiley and Sons 🌐 English βš– 313 KB πŸ‘ 2 views

A correlation between the film properties of nitrides, oxides etc., and their structure, is of fundamental importance – not only for thin solid films physics but also for practical applications. The structure of the films depends on deposition methods and their parameters. The relationship between p