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Influence of N2 flow ratio on the properties of hafnium nitride thin films prepared by DC magnetron sputtering

✍ Scribed by Longyan Yuan; Guojia Fang; Chun Li; Mingjun Wang; Nishuang Liu; Lei Ai; Yanzhao Cheng; Huimin Gao; Xingzhong Zhao

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 181 KB
Volume: 253
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2007.04.024

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